Chemomechanical Production of Functional Structure on Silicon Surfaces
Here the chemomechanical method was used to scribe the silicon surface with a diamond-tipped instrument in the present of aryldiazonium salt, so we can connect the silicon and the arenes with covalent bond, and realize simultaneously functionalizing and patterning silicon. This provided experiment basis for building nano-scale functional structure. At first we scribe the silicon with a diamond-tipped instrument in the atmospheric, and research how could we get the micro-structure with better surface quality, and this will provide good substrate for the next functionalizing and patterning silicon. We do the silicons controlled self-assembly experiments in the solution, research the cutting speed and cutting assembly time on the department to the self-assembled monolayers quality ( SAMs ), summed up more parameters suitable for the film growth.Using X-ray photoelectron spectroscopy ( XPS ) to test the self-assembly monolayers and Atomic Force Microscopy ( AFM ) as well as scanning electron microscopy ( SEM ) to characterize the surface morphology. Prove that this method can efficiently achieve simultaneously functionalizing and patterning silicon. We connect the carbon nanotubes to the SAMs, and charatrerize the surface with AFM, this will provide experimental basis for the further study using SAMs to function silicon surface.
chemomechanical method function silicon surface self-assembly monolayer analysis
史立秋 孙涛 闫永达 董申
哈尔滨工业大学精密工程研究所,哈尔滨150001 中国
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）