Exploratory of micro actuators application in late-model fuse1
Microminiaturization stands for trend in development of late-model fuse. With the development of MEMS technologies becoming increasingly mature, their applications in late-model fuse gain more and more value, Especially micro sensors were extensively applied in new micro fuse. Micro actuator was a very important element of MEMS technology，but application study of micro actuator in new micro fuse by MEMS technology was very little. By analyzing various drive principle of multiple micro actuators which MEMS technology put to be used, such as mechanics actuator, thermal actuator, chemical actuator, magnetic actuator etc, exploration was in progress on applications of micro actuator with various drive principle in late-model fuse in this article.
micro actuators late-model fuse MEMS
吴越 李艳 杨卫 张文栋
中北大学电子测试技术国家重点实验室,山西太原 030051;中北大学机械电子工程学院,山西太原 030051 中北大学电子测试技术国家重点实验室,山西太原 030051
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）