Detection Selectivity Analysis of MEMS Trace Explosive Sensor
Micro silicon beam structure fabricated using MEMS (Micro Electro-Mechanical System) technology has been widely used in trace explosive detection, and high selectivity detection of analyte(s) with MEMS sensor is a major research effort at present. Some kinds of detecting methods based on different principles are summarized along with their intrinsic selectivity problems; and the possible solutions of this problem are also proposed.
Detection selectivity Trace explosive detection Micro silicon beam Microcantilever MEMS
齐永光 孔德义 李庄 鲍路路 周丽丽 于震 林丙涛 江儒龙
中国科学院合肥智能机械研究所,传感技术国家重点实验室,安徽省仿生感知与先 进机器人技术重点实验室;中国科学技术大学,自动化系 中国科学技术大学,自动化系
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）