Theory Analysis and Design of the Thermopiles Infrared Sensor

摘要：

This paper mainly introduced the theory of thermopiles, computer and analyse the thermopiles that was composed of P-poly-Si and AL,account out the optimization quotiety, and design and analyse the thermopiles structure and craftwork.This design that the P-poly-Si and AL is on a same layer, dont like the old close film structure,and coat a adiabatic lay on the cold end,so as to enhance thermopiless detecting efficiency.

关键词： Thermopiles The optimization quotiety MEMS craftwork Infrared Sensor

作者: Du Peng Tan Qiu-lin Bao Ai-da

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement(North University of China),Ministry of Education Department of Electronic Science and technology,North university of China,Taiyuan,030051,

会议类型: 国际会议

会议名称: 第六届中国国际纳米科技研讨会

会议地点: 成都

会议语种:英文

在线出版日期: 2007-11-19（万方平台首次上网日期，不代表论文的发表时间）