Preparation and PL properties of monodisperse,size-controlled silicon nanoparticles
Homogeneous particles size distribution is the basic requirement for high photoluminescence efficiency of silicon nanoparticles. In this paper, NC200U nanoclusters source with a magnetron sputtering source was used to synthesis monodisperse and size-controlled silicon nanoparticles on silicon wafer. The results showed that the introduction of helium is help to obtain tiny silicon nanopaticles and improve the PL property of the silicon nanoparticles. According to HRTEM and PL spectra of silicon nanoparticles, silicon nanoparticles in single crystal and twins forms with average size less than 5nm have a distinct PL double peaks spectra in violet and blue region at room temperature when helium flow rate was 10sccm.
size-controlled photoluminescence silicon nanoparticle magnetron sputtering
王磊 朱世伟 陈兴 屠海令 杜军
北京有色金属研究总院先进电子材料研究所,北京 100088
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）