压缩喷雾热分解方法制备MgO 薄膜的研究

摘要：

Using Mg(CH3COO)2 as precursor, the effects of some experimental parameters on the quality of the Mgo film by a simple compress spray prolysis were discussed in detail. In addition，the Microstructrue of the MgO thin films were examined with X-raydiffraction(XRD) and scan electron microscopy(SEM)， The better condition had been concluded.The results indicated that substrate temperature and deposition rate were key factors for growing MgO fims， and oriented MgO films were obtained when the substate temperature and the flow rate of O2 was 600℃ and 2L/min respectively，The surface morphology of the as-prepared MgO films was cuber polycrystalline.

关键词： MgO thin film Compress spray pyrolysis experimental parameters

作者: 吕爱君 武光明 邢光建 谢琪

作者单位: 北京石油化工学院数理系,北京

会议类型: 国际会议

会议名称: 第六届中国国际纳米科技研讨会

会议地点: 成都

会议语种:中文

在线出版日期: 2007-11-19（万方平台首次上网日期，不代表论文的发表时间）