Effect of Oxygen Pressure on Properties of WOx Thin Films Deposited on Soft Substrate
WOx films were deposited on polyethylene terephthalates (PET) soft substrate by RF magnetron sputtering at room temperature. The microstructure, transmittance and the binding energy of O element in WOx films were analyzed by X-ray diffraction (XRD), UV-Vis spectroscopy and XPS, respectively. It can be found that all the WOx films are amorphous. The variation of transmittance in colored and bleached WOx films reached the maximum value 25％, which indicated that the electrochromic property was best. The XPS analysis revealed that the oxygen vacancy content was lowest at the oxygen concentration 8％, and the oxygen vacancy content increased with the increasing oxygen concentration.
WOx film Room temperature deposition electrochromic RF- magnetron sputtering
唐武 李海霞 翁小龙 邓龙江 马大衍
电子科技大学电子薄膜与集成器件国家重点实验室教育部隐身材料与技术工程中心,四川成都 610054 西安交通大学金属材料强度国家重点实验室,西安,710049
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）