Preparation and property of pure tin oxide thin films by spray pyrolysis process
By using SnCl2·2H2O as raw material ,the pure SnO2 thin films were prepared on the glass and quartz flat substrates by spray pyrolysis process. The crystal structure and surface morphology of the thin films were characterized by using XRD and SEM. The transmittance of films was measured by spectrophotometer; the square resistance was detected by four-probe meter. The films which were prepared at 500℃ are smooth and fine.At 320℃, the films which were prepared for 50min show relatively strong diffraction peak; at the same spray time, the strength of diffraction peak is enhanced; the transmittance of the samples which were sprayed for 20min at 320℃ is best, and is above 90％ at every wave band,with prolonging spray time and elevating subsrate temperature, the square resistance of the films go down.
tin dioxide film spray pyrolysis temperature
韩彬 武光明 邢光建 李冲
北京石油化工学院材料科学与工程系,北京
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）