The Fabrication of Micro/Nanoscale Sculptured thin films
Sculptured thin films can be fabricated with e-beam evaporation of physical vapor deposition by glancing angle deposition (GLAD) to different type whose size is between 100 and 200nm. The results investigate obvious porous morphology can be seen when the deposition angle is more than 70°.The column or helicoidal can be fabricated by controlling the substrate rotating or not. Meanwhile, the size of the distance between two screw threads can be controlled by controlling the rate of deposition. Zig-Zag of porous sculptured thin films can be fabricated by changing the angle of deposition while depositing.
Thin films Glancing angle deposition Helicoidal Zig-Zag
王超义 唐继甲 江绍基
中山大学显示材料与技术国家重点实验室,510275,广州
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）