Study on a novel micro /nanofabrication technologies
The several micrometers high-intensity particles trapped by optical tweezer are used as microathe-tools, and these micro-particles can be moved and rotated with the driving of optical tweezer . So Micro/nanometer scale micro-cutting on the processed surface can be finished. The results of the digital simulation on the basis of l optical models indicate that the micro-particle can be controllable with high accuracy. At the same time, the force acting on it will be heading downwards to form micro-process force, and the force and optical torque magnitude is controllable to achieve difficult microfabrication depth. From above analysis, it can concluded that realizing microfabrication based on optical tweezer technology is feasible in theory. The optical-tweezer system for microfabrication satisfied to the best trapping conditions was established, with which high rigidity micro-particles in liquid was trapped and the machining trace of 5μm width and 2nm depth is abtained. Optical tweezer technology is a effective means of micro/nanofabrication in future.
micro/nanofabrication optical tweezer technology microparticles
王晓娜 白剑 侯西云 杨国光 郭天太
中国计量学院,310018,杭州 浙江大学现代光学仪器国家重点实验室,310027,杭州
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）