The design and simulation of RF MEMS switch
With the HFSS5.6 and ANSYS7.0 software, the relationship between the structure parameters of the RF MEMS series switch and its microwave characteristics and the mechanical behaviors has been studied respectively .After proposing the structure design and better size of the switch ,the study finds the better geometric parameters of the cantilever. Based on the findings, an RF MEMS switch with g of 3μm, d of 60μm, A of 80×100μm2 and w of 100μm, L of 150μm, W of 80μm, Ts of 1.5μm was designed. With the switch, at 10V, the deflections of the cantilever are around 3μm. At 5GHz, an echo loss smaller than 0.2dB and isolation larger than 35dB are achieved in this RF MEMS switch.
MEMS Microwave switch Simulation
谌贵辉 张万里 彭斌 蒋洪川
西南石油大学电子信息工程学院 成都 610500 电子科技大学微电子与固体电子学院 成都610054
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）