Analysis on nonlinear effects of nanoresonator with structure consideration

摘要：

Nonlinear characteristics of NEMS-resonator are analyzed theoretically and dynamic equation of nanoresonator has been derived in this paper. The results demonstrate that the minimum Alternating Current which drives nanoresonator into nonlinear region is increasing rapidly when paddle width is smaller than three times that of beam length; the minimum Alternating Current for nanobeam without paddle structure operating in nonlinear region is 1.556V.

关键词： MEMS Microwave switch Simulation

作者: 张伟 刘泽文 李志坚

作者单位: 清华大学微电子学研究所,100084,北京

会议类型: 国际会议

会议名称: 第六届中国国际纳米科技研讨会

会议地点: 成都

会议语种:英文

在线出版日期: 2007-11-19（万方平台首次上网日期，不代表论文的发表时间）