Design optimization of MEMS piezoresistance micro-accelerometer
In the past, design optimization of technical systems was usually based on the experience of the designer, who analyzes the system performance and modifies individual system parameters. This kind of optimization becomes more and more difficult with an increasing number of design parameters. Considering this, this paper introduces the method for parameter optimization of piezoresistance accelerometer combined with ANSYS. After comparing structure optimization with original structure, it proves that the accelerometers structure sensitivity is five times more than the original and output sensitivity is almost three times more than the original. And this paper introduces simply the principle of micro-accelerometer on and some notion of finite element optimization.
Micro-accelerometrer Piezoresistive finite element optimization Structure optimization
郭涛 李丽华 熊继军 孔繁华
中北大学电子测试技术国家重点实验室,太原,山西,030051
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）