Research on Novel Triaxial Piezoresistive Micro-Silicon Accelerometer
(0) Micro Inertial systems and other high-pr acceleration vector. To solve this kind of problems, a four-sides and eight-beams, triaxial piezoresistive micro-silicon accelerometer is introduced in this article, three axial accelerations can be measured at the same time with high- precision using a single mass on silicon underlay and Wheatstone half-bridge structure. Furthermore the silicon-glass protecting structure for these accelerometers in the situation of over-loading and bulk process is designed. Through the ANSYS simulation and test it is validates that the structure is reasonable, and the relevant performance of the Micro-accelerometer is tested. The test results show that the micro-accelerometer has high precision and good linearity and satisfy design requirements.
High Precision Piezoresistive Micro-accelerometer Anti-overloading Bulk Process Linearity
甄国涌 赵慧
中北大学教育部仪器科学与动态测试重点实验室,太原030051
国际会议
成都
英文
2007-11-19（万方平台首次上网日期，不代表论文的发表时间）