Design and Simulation of a DC-Contact Series RF MEMS Switch

摘要：

The design and simulation of a DC-contact series RF MEMS switch with slanting beams is reported. By introducing of slanting beams, the warping problem of cantilever beam under residue stress is solved. The layout and process is designed. HFSS and Intellisuite is used to simulate the RF performance and the mechanical characteristic respectively. The insertion loss is <0.1dB@DC～10GHz; the isolation is <0.1dB@DC～10GHz and the pull-down voltage is about 35V. The novel DC-contact RF MEMS switch is suit for the application of frequency range from DC to 6GHz.

关键词： Radio Frequency MEMS DC-Contact Series RF MEMS Switch Residue Stress

作者: 侯智昊 刘泽文 胡光伟 刘理天 李志坚

作者单位: 清华大学微电子学研究所,北京,100084

会议类型: 国际会议

会议名称: 第六届中国国际纳米科技研讨会

会议地点: 成都

会议语种:英文

在线出版日期: 2007-11-19（万方平台首次上网日期，不代表论文的发表时间）