The Analysis of the Measurement Uncertainty for the Fiber Phase Shifting Point Diffraction Interferometer

摘要：

The primary restriction on the precision of spherical figure measurement is the imperfectness of the reference spherical wavefront. Using the nearly perfect spherical wavefront diffracting from a single mode fiber as the reference, the accuracy of spherical figure measurement can be greatly improved. The paper mainly analyzes the measurement uncertainty of the fiber point diffraction interferometer (FPDI). The measurement uncertainty of the FPDI comes from the following factors: 1.The spherical figure error of the reference wavefront diffracting from the fiber tips. 2. The flatness of the fiber tips. 3. The phase shifting error of PZT. 4. The tilting error introduced by adjustment during measurement. 5. The environmental influences such as temperature, vibration, and air turbulence. In all of these factors, the flatness of the fiber tips mostly affects the measurement uncertainty. The estimation of the expanded uncertainty for spherical figure measurement by FPDI is about λ/100 ( λ=532nm).

关键词： point diffraction interferometer fiber phase shifting measurement uncertainty

作者: Chen Lingfeng Wu Shuo Zhang Xusheng Sha Dingguo

作者单位: Optical Measurement Lab, Dept of Optical Engineering, Beijing Institute of Technology, Beijing, 100081 China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）