Research on Integrated Multi-range Micro Accelerometer Array

摘要：

One accelerometer can not measure signals accurately, if the acceleration of the same point differs obviously at different time. A new design of integrated multi-range micro silicon accelerometer can solve the above problem, because it integrates a multi-range micro silicon accelerometer chip into signal conditioning circuit, which is sensitive to acceleration signals, one that have different electrical level and frequency at the same direction. Given measurements, this kind of accelerometer has excellent linearity and frequency response, and promising application.

关键词： integrated micro silicon accelerometer array linearity frequency response

作者: Guo Tao Xu Xiaohui Li Lihua XU Dong MAO Haiyang

作者单位: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Sci Luoyang College of technology, luoyang, Henan 471023, China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）