The Research on Micromachined Resonant Accelerometer
This paper proposes a novel silicon micromachined resonant accelerometer. In this design, two double-ended tuning forks (DETF) serve as the stress-sensitive resonators. When an external acceleration is applied, the inertial force generated by the proof mass imposes on fork axially through the cantilever; consequently the shift in the reason frequency of the fork reflects the acceleration. Electrostatic combs are attached to each tine in order to drive the fork to resonate as a voltage is applied, and the capacitance between the fixed and movable combs is used to sense the resonant frequency. By its quasi-digital output, the trouble in detecting feeble analog signals from most MEMS devices could be averted.
micro electromechanical system accelerometer resonator double-ended tuning fork
JIAO Xinquan GONG Lili
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education National Key Laboratory for Electronic Measurement Technology Department of Electronic Science and technology, North university of China, Ta
国际会议
北京
英文
2007-08-05（万方平台首次上网日期，不代表论文的发表时间）