Design of Integrated Digital Accelerometer

摘要：

Utilizing the silicon microfabrication, microprocessor and hybrid integrated technology, a tri-axial acceleration sensor with digital signal output was developed against the requirements of sensing technology for missile-loaded testing equipment. The sensitive component, signal adjusting circuit, A/D convertor and standardized transmission interface cell were integrated in it. The size of the sensor is only about a quarter of the old one. Linearity and temperature characteristics were greatly improved. Furthermore, the measuring accuracy and reliability of the system were enhanced.

关键词： Digital Acceleration Sensor Micromachining Technology Hybrid Integration RS4221

作者: GUO Hugang LIU Jun MA Xihong

作者单位: National Key Laboratory for Electronic Measurement Technology Key Laboratory of Instrumentation Science & Dynamic Measurement North University of China,Ministry of Education North University of China, Taiyuan ,030051, China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）