Design of Integrated Digital Accelerometer
Utilizing the silicon microfabrication, microprocessor and hybrid integrated technology, a tri-axial acceleration sensor with digital signal output was developed against the requirements of sensing technology for missile-loaded testing equipment. The sensitive component, signal adjusting circuit, A/D convertor and standardized transmission interface cell were integrated in it. The size of the sensor is only about a quarter of the old one. Linearity and temperature characteristics were greatly improved. Furthermore, the measuring accuracy and reliability of the system were enhanced.
Digital Acceleration Sensor Micromachining Technology Hybrid Integration RS4221
GUO Hugang LIU Jun MA Xihong
National Key Laboratory for Electronic Measurement Technology Key Laboratory of Instrumentation Science & Dynamic Measurement North University of China,Ministry of Education North University of China, Taiyuan ,030051, China
国际会议
北京
英文
2007-08-05(万方平台首次上网日期,不代表论文的发表时间)