Research on the High Accuracy Displacement Measuring and Display System

摘要：

The display system of high accuracy displacement usually adopt the grating ruler displacement sensor. For the ordinary grating ruler, the limit of the manufacture craft will result in the resolution is only several 10 microns, which could not satisfy the request of high accuracy test. In this paper, we provide a method of subdividing the output signal of grating ruler to improve the accuracy of displacement measure.

关键词： grating ruler subdivide distinguish circuit CPLD

作者: XU Dongming WENG Chunfeng LEI Meirong

作者单位: Department of Optoelectronic Engineering, ChangChun University of Science and Technology,130022

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）