The Design of Thick-film Piezoresistive Accelerometer
This paper introduces the design of piezoresistive accelerometer, signal regulating circuit and thick-film technology. The piezoresistive accelerometer and the signal regulating circuit are hybridly integrated by using thick-film technology, making it a whole accelerometer testing system. Therefore, the miniaturization and integration of accelerometer can be is realized, so can the reliability,flexibility,universality.
sensor piezoresistive thick-film hybrid integration regulating circuit1
MA Xihong ZHANG Wendong
National Key Laboratory of the Electronic Measurement Technology Key Laboratory of Instrumentation Science & Dynamic Measurement North University of China Ministry of Education, Taiyuan, 030051 China
国际会议
北京
英文
2007-08-05(万方平台首次上网日期,不代表论文的发表时间)