The Design of Thick-film Piezoresistive Accelerometer

摘要：

This paper introduces the design of piezoresistive accelerometer, signal regulating circuit and thick-film technology. The piezoresistive accelerometer and the signal regulating circuit are hybridly integrated by using thick-film technology, making it a whole accelerometer testing system. Therefore, the miniaturization and integration of accelerometer can be is realized, so can the reliability,flexibility,universality.

关键词： sensor piezoresistive thick-film hybrid integration regulating circuit1

作者: MA Xihong ZHANG Wendong

作者单位: National Key Laboratory of the Electronic Measurement Technology Key Laboratory of Instrumentation Science & Dynamic Measurement North University of China Ministry of Education, Taiyuan, 030051 China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）