Design and Simulation of a Completely Decoupled Micromechanical Gyroscope

摘要：

In order to solve any asymmetry in t1he device vibration patterns due to fabrication, a novel completely decoupled MEMS capacitive Gyroscope is presented. This structure completely solves the coupling between the drive and sense mode from the structure itself. At the same time, the structure allows approximately matched resonant frequencies for the drive and sense vibration modes for improved sensitivity. The structure is fabricated by standardized bulk silicon process technology for realizing batch production. This paper describes the design characteristic and simulation result of the structure.

关键词： MEMS gyroscope capacitance frame

作者: GUO Huifang LI Jinming LIU Jun ZHANG Wendong MA Youchun ZHOU Zhaoying

作者单位: Key Laboratory of Instrument science & Dynamic Measurement (North University of China), Ministry of Department of Precision Instruments and Mechanology, TsingHua University, Beijing, 100084, China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）