Parameter extraction from electrical measurements on cantilever beams

摘要：

During surface micromachining, the deposition and processing steps can cause variations in mechanical properties like Youngs Modulus as well as in geometry which in turn decide the final performance of the device. Hence it is necessary to design appropriate test structures to measure these properties. We describe here simple electrical measurements of pull-in and resonance frequency on polysilicon cantilever beams to extract Youngs Modulus, Poissons Ratio and gap. A simple electrical method to estimate the force of stiction from pull-in and pull-out measurements on cantilever beams is also described.

关键词： MEMS cantilever resonance polysilicon pull-in pull-out Youngs modulus stiction

作者: Enakshi Bhattacharya Somashekara Bhat Souvik Basu Anil Prabhakar

作者单位: Department of Electrical Engineering, Indian Institute of Technology Madras Chennai 600036, India

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）