Fabrication of a Microflow meter using bulk micromaching of silicon
This paper presents a microflowmeter using a micro turbine on a silicon chip. It dos not only measure the flow of the gas but also control the input of the gas in an automatic manner. A micro turbine of 2000 μm radius has been made in silicon chip by bulk micromaching technology. It can rotate up to a speed of 50000rpm with a jet of air. An optical photovoltaic sensor of 200 μm has been generated in the cavity of the silicon under the blades of the turbine. The number of output pulses of the sensor due to the chopping of the incident light, by rotation of rotor, has been correlated with flow of the gas. The control circuit commands the input flow based on closed loop system. This microflowmeter has the response time in microsecond.
V. K. Jain
National Physical Laboratory, Dr. K.S.Krishanan Marg, New Delhi 110012
国际会议
北京
英文
2007-08-05（万方平台首次上网日期，不代表论文的发表时间）