Mechanical characteristic of vibratory angular rate gyroscope using MEMS Technology
A high performance comb-driven vibratory angular rate gyroscope is presented in the paper. The gyroscope uses a rotary electrostatic actuation and differential capacitive sensing. The calculations show a resolution of about 8 deg/hr. The gyroscope is fabricated using MEMS bulk micromachining on a SOI wafer. The high sensitivity of the present design is achieved by employing a large sensing area coupled with a higher layer thickness. Simply increasing the sensor area without increasing the layer thickness may yield a higher sensitivity, but lead to problems such as stiction and lower pull-in voltages. Increasing the suspension stiffness increases the pull-in voltage. However, an increase in suspension stiffness may also increase the natural frequencies which will lower the sensitivity and resolution.
Vibratory angular rate gyroscope Microelectromechanical systems (MEMS) Bulk micromachining Deep reactive ion etch (DRIE)
J. -M. Huang H. Guo Z. L. Deng
School of Electronic Engineering Beijing University of Posts and Telecommunications, Beijing 100876, P. R. China
国际会议
北京
英文
2007-08-05（万方平台首次上网日期，不代表论文的发表时间）