The Research of the Capacitive RF MEMS Switches on the Low Actuation Voltage

摘要：

In order to depress actuation voltage of RF MEMS switches ，based on theories of electro- mechanics, this paper discusses and analyzes the actuation voltage of the switches with the different shapes and the different material of top electrode. The results of performance simulation using the Thermo-Electro-Mechanical module of IntelliSuite software show that the actuation voltage of RF MEMS switches is mightily influenced by the shape of the RF MEMS switches and the different material of top electrode. The shape of the RF MEMS switches is the primary factors that determine the actuation voltages of the RF MEMS switches. The simulated actuation voltages of the RF MEMS switches with Al top electrode is a little lower than one with Au top electrode.

关键词： RF MEMS Switch Low actuation voltage Simulation

作者: SONG Mingxin YIN Jinhua HE Xunjun ZHU Min SONG Liang

作者单位: School of Applied Sciences, Harbin University of Science and Technology, Harbin 150080, China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）