Analysis and Design of the Sensing Element of Three-Axis High-G MEMS Accelerometer

摘要：

On the basis of analyzing the disadvantage of other structural accelerometer, three-axis high-G MEMS, silicon, piezoresistive accelerometer was put forward in order to apply to the high-shock test field. Design and simulation of the sense element were implemented, by means of finite element analysis software, ANSYS. The accelerometers structure and working principle were discussed in details. The structural size of the sense element was fixed by transient analysis, modal analysis and static analysis. The accelerometer can be widely applied to the high-shock test field of weapon.

关键词： High-g sense element three-axis piezoresistive accelerometer MEMS

作者: ZHANG Zhenhai LI Kejie

作者单位: National Key Laboratory of Mechatronic Engineering and Control, Beijing Institute of Technology, Beijing, 100081 China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）