Adhesion Analysis of MEMS Switch Consisting of a Cantilever Beam Under Casimir Force
A MEMS switch consisting of a cantilever is a membrane-type structure, the slenderness ratio of which is quite large, and the gap between the beam and the substrate is quite small, so the adhesion caused by the Casimir force should be studied in detail. In the paper a critical adhesion gap under the Casimir force is first introduced, then a two-dimensional static model is presented to analyze the adhesion of MEMS switches, and a numerical iterative method is used to solve for the critical adhesion gap under the Casimir force. In the examples, some critical adhesion gaps are calculated to some different cantilever beams by using the model and the iterative method, and some curves about the relationship between the length and the critical adhesion gap are given, from which the effect of the length and the thickness of the cantilever beam on the critical adhesion gap can be understood.
Casimir force MEMS switch Critical adhesion gap Two-dimensional static model
Cao Tianjie Ding Fang
Civil Aviation University of China, Tianjin 300300, China
国际会议
北京
英文
2007-08-05（万方平台首次上网日期，不代表论文的发表时间）