Angular measurement for rotational MEMS devices

摘要：

Based on the measurement algorithms of MEMS translational measurement, this paper puts forward a Translational-Point-Track-Based (TPTB) algorithm to calculate the angles of rotational MEMS devices. By an iteration algorithm, we can get the center points of black circles. The perpendicular bisector lines are used to calculate the rotational center. According to the experimental result, the 95％ confidence space of the subpixel translational measurement algorithm is 20.9nm, and the error of the angular measurement is less than 1％.

关键词： MEMS angular measurement subpixel measurement

作者: YU Chao WANG Boxiong ZHENG Hanqing LUO Xiuzhi

作者单位: State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）