Study on the sensitivity and linearity of the stress sensors based on meso-piezoresistance effect
The sensitivity and lineartity of the stress sensors based on meso-piezoresistance effect has been studied.. The special characteristic of negative differential resistant region of the I-V curve has been considered,which has big slop and can be used to get higher sensitivity.The second order derivative of the I-V curve has been considered too,which determain the linearity of the sensor.The work shed light for the study and design of the sensors based on meso-piezoresistance effect.
sensitivity linearity differential negative resistence meso-piezoresistance effect.
HUANG Qiyu
Department of Physics, North University of China, Taiyuan, 030051
国际会议
北京
英文
2007-08-05（万方平台首次上网日期，不代表论文的发表时间）