The Realization of Weak-Signal Detection Circuits for MEMS Resonant Accelerometers
A basic requirement for the design of higher precision resonance accelerometers is a reduction in the errors in the output signals introduced by environmental noise during signal transmission and processing . In order to improve the precision of detection, sensitive and wide dynamic-range resonant accelerometers were fabricated in Peking University that utilized static driving and capacitance detection. The capacitance pick-up circuit and the frequency-separation circuit were specifically designed to detect weak signals. Subsequently, precision protractors were used to test the capability of the accelerometers designed. As demonstrated by experiments, the sensitivity of these accelerometers was about 25.7 Hz/g while the test errors were about 0.27 Hz/g.
Jun Liu Ling Wang Yunbo Shi Fai Ma
National Key Lab for Electronic Measurement and Technology, North University of China, Department of National Key Lab for Electronic Measurement and Technology, North University of China, Department of Department of Mechanical Engineering University of California, Berkeley, CA 94720, USA
国际会议
北京
英文
2007-08-05（万方平台首次上网日期，不代表论文的发表时间）