The research and Design for a Balancing-force MEMS Gyroscope Based on Tunneling Effect

摘要：

This paper present a high-accuracy low-range tunnel gyroscope manufactured by silicon micro process technology. The tunnel gyroscope combined high sensitivity with coriolis principle. Besides, this paper also analyzed the basic components of the gyroscope in detail, and set feasible technological processes. We also represented the key technology needed in the process of processing. In the end, we researched the manufacturing technology of the tunnel needle point.

关键词： gyroscope Tunneling Effect process technology

作者: Yunbo Shi Zongmin Ma Meiyu Meng Jun Liu Yuanyuan Luo

作者单位: National Key Lab for Electronic Measurement and Technology, North University of China, Taiyuan, Shan National Key Lab for Electronic Measurement and Technology, North University of China, Taiyuan, Shan

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）