The Design of a Novel Micromachined Thermal Angular Rate Sensor

摘要：

This paper introduces a novel kind of angular rate sensor which is fabricated by micromachined technology. Based on thermal principle, this device has no proof mass and its sensing element is heating gas sealed in it. So it has the advantages of miniaturization and good reliability. The structure design and fabrication process of this new device are described in this paper. Finally the measurement results are discussed.

关键词： Angular rate sensor MEMS Convective

作者: Xu Shujing Lv Shuhai Yang Yongjun

作者单位: Hebei Semiconductor Research Institute P.O. Box 179-38＃, Shijiazhuang, 050051, P. R. China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）