Fabrication of micromechanical double-layer fixed-fixed beams on Pyrex glass

摘要：

Fixed-fixed beams are a kind of common structure in many MEMS devices and most of them reported are fabricated on silicon substrate. In this paper, double-layer fixed-fixed beams are fabricated on glass using SiC as both supporting layer and masking layer. Various annealing conditions are investigated for topographical flatness and stabilization of fixed-fixed beams. 1 μm thick film under 450°C annealing for half an hour is found to be ideal for this propose. Besides, increasing back sputter time is verified to successfully solve the metal peel off phenomenon during 1 hour concentrate HF etchant. This process allows the fabrication of a long well-flatten suspend beam with several hundreds micrometers gap in glass substrate and has been utilized to fabricate hot-wires and groove in our novel jet fluidic gyroscope.

关键词： fixed-fixed beams glass groove PECVC SiC Stress MEMS

作者: Le Zhang Lina Sun Tingting Yu Lu Zhang Guizhen Yan

作者单位: National Key Laboratory of Micro/Nano Fabrication Technology Institute of Microelectronics, Peking University, Beijing, 100871, China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）