Study on the Youngs Modulus of Silicon Nano-membrane

摘要：

A new model is presented in this article to calculate the in-plane Youngs modulus of nano-scaled silicon membrane. In comparing with the traditional model, it accounts for the discrete nature in the thickness of the silicon membrane and inter-atomic bonding forces are equivalent to spring forces. Investigating the in-plane Youngs modulus, it is found that the value is highly dependent on the thickness of the membrane and approaches to the bulk value as the thickness increases. The results are in agreement well both with the experimental results and with the simulation results by molecular dynamic software.

关键词： Youngs modulu silicon nano-membrane

作者: BAO Fang YU Hong LU Qingru HUANG Qingan

作者单位: Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）