会议专题

A Novel Design of Band-stop Filter Using MEMS and Electromagnetic Band-gap (EBG) Technology

A novel type of Electromagnetic Band-gap (EBG) band-stop filter and its equivalent model is proposed in this paper. EBG unit cell equivalent circuit model is derived using electromagnetic field theorem. The EBG cells were cascaded to form a band-stop filter, which was fabricated and measured. The fabrication is carried on high resistivity silicon substrate using microelectromechanical systems (MEMS) surface micromachining process. The measurement result reveals a 20 dB stop-band that has a bandwidth of 13.2 GHz. The insertion losses for the lower pass-band and the higher pass-band are less than 2 dB and below 4.5 dB respectively. a high potential is possessed for the EBG band-stop filter to be integrated with CMOS compatible devices.

microelectromechanical systems (MEMS) Electromagnetic Band-gap (EBG) band-stop filter surface micromachining process

H. Guo J. -M. Huang Z. L. Deng

School of Electronic Engineering Beijing University of Posts and Telecommunications, Beijing 100876, P. R. China

国际会议

第七届国际测试技术研讨会

北京

英文

2007-08-05(万方平台首次上网日期,不代表论文的发表时间)