A Novel Design of Band-stop Filter Using MEMS and Electromagnetic Band-gap (EBG) Technology

摘要：

A novel type of Electromagnetic Band-gap (EBG) band-stop filter and its equivalent model is proposed in this paper. EBG unit cell equivalent circuit model is derived using electromagnetic field theorem. The EBG cells were cascaded to form a band-stop filter, which was fabricated and measured. The fabrication is carried on high resistivity silicon substrate using microelectromechanical systems (MEMS) surface micromachining process. The measurement result reveals a 20 dB stop-band that has a bandwidth of 13.2 GHz. The insertion losses for the lower pass-band and the higher pass-band are less than 2 dB and below 4.5 dB respectively. a high potential is possessed for the EBG band-stop filter to be integrated with CMOS compatible devices.

关键词： microelectromechanical systems (MEMS) Electromagnetic Band-gap (EBG) band-stop filter surface micromachining process

作者: H. Guo J. -M. Huang Z. L. Deng

作者单位: School of Electronic Engineering Beijing University of Posts and Telecommunications, Beijing 100876, P. R. China

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）