Design of micro MEMS gas sensor based on PID principle

摘要：

PID （ Photo Ionization Detector ） principle is presented, and the feasibility of production of gas senor based on PID principle is also analyzed in the paper. The structure of the ion room is designed and processed in bulk process technology, which makes the capacity and weight of ion room greatly reduced. Corresponding detection circuit and system configuration are also designed. The gas sensor has the advantages of small capacity and low cost, and prospect of application is very bright.

关键词： PID MEMS gas sensor

作者: JIAN Aoqun XUE Chenyang Zhang Binzhen Zhang Wendong

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education;National Key Laboratory For Electronic Measurement Technology, North university of China, Taiyuan, 030051

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）