The present status and future development of Nano-electro-mechanical systems

摘要：

Nanoelectromechanical System (NEMS) is a nano-scale integrated electro-mechanical system, a new technology field developed with the progress of nano-tech and the Microelectromech -anical system (MEMS). Because of the high integration level and high performance, NEMS represents the future development of MEMS and attracts more and more attentions. This paper introduces the concept of NEMS first, and then describes its actuality and trend of the development. The nano-effect are discussed in detail, and the basic technology of NEMS, such as nano measurement, nano photograph, nano processing, and NEMS packaging, is also reviewed. The typical applications of NEMS in biology, information , fluid, and especially military fields are listed. At the end, this paper points out the difficulties for NEMS development, and gives a primary expectation of NEMS future.

关键词： NEMS MEMS nano-effect nano-tech integration

作者: WANG Qiang ZHANG Liuqiang WEN Zhiyu YANG Haijun

作者单位: Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China Microsystem Research Center, College of OptoElectronic Engineering, Chongqing University, Chongqing, 400044

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）