The Design and Modelling of a GaAs-Based NEMS Vector Hydrophone
This paper reports a novel analytical modeling of a GaAs-based NEMS vector hydrophone based on resonant tunneling diode (RTD). The proposed hydrophone consists of four-beam micro-structure and rigidity plastic cylinder. The sensitive unit is the RTD piezoresistors which are located at the beams, and the sensing principle is based upon the acoustic theory of cylinder. To obtain an application specific optimum design parameters and predict the hydrophone performance ahead of actual fabrication, finite element modelling (FEM) was performed. The experiment results were given at last, the results showed that this kind of hydrophone possesses directional pattern in form of 8 shape, and can be used for obtaining vector information of underwater sound field.
vector hydrophone RTD ANSYS NEMS
CHEN Shang XUE Chenyang ZHANG Binzhen ZHANG Guojun TONG Zhaomin
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science,Dynamic Measurement (North University of China), Ministry of Education Department of Electronic Science and technology, North university of China, Tai
国际会议
北京
英文
2007-08-05（万方平台首次上网日期，不代表论文的发表时间）