An Acoustic Sensor Based on the Piezoresistive Effect of RTS

摘要：

Pressure applied to the resonant tunnelling diode (RTD) changes its current-voltage characteristics, which can be used on sensor design. This paper reports an acoustic sensor based on AlAs/InGaAs/GaAs resonant tunnelling structures (RTS), which is using air-bridge technology. The RTD is incorporated in a 10 m μ thick cantilever diaphragm using inductivity coupled plasma (ICP) technology and the fabrication of the cantilever diaphragm is based upon the micromachined control holes technology by ICP too. After the fabrication of sensor, elementary measurements have been carried on, which show the sensor has a good frequency response.

关键词： Acoustic sensor RTD Air-bridge ICP.Control holes.

作者: TONG Zhaomin XUE Cheyang ZHANG Binzhen WANG Jian ZHANG Wendong

作者单位: National Key Laboratory for Electronic Measurement Technology,Key Laboratory of Instrumentation Science＆Dynamic Measurement (North University of China), Ministry of Education Department of Electronic Science and technology, North university of China, Tai

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）