Design and Measurement of a Si-based Vector Hydrophone Based on Piezoresistive Effects

摘要：

The paper introduces a novel Si-based vector hydrophone based on piezoresistive effects. The 1structure of this hydrophone consists of two parts: high-precision four-beam underwater acoustic receiving transducer and rigidity plastic cylinder which has the same density of water. The fabrication of the micro-structure is completed by standard silicon-based MEMS technology. Moreover, the properties of vector hydrophones have been calibrated both on vibration table and in sound absorbing pool for the elementary calibration. The paper also presents the design of signal processing circuit in detail. At last, the results indicate that the vector hydrophone not only is fit for submarine sound source detection at low frequencies, but also possesses a typical directivity of 8-shape.

关键词： vector hydrophone low-frequency detection measurement

作者: QIAO Hui LIU Jun ZHANG Binzhen XUE Chenyang CHEN Shang

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education National Key Laboratory for Electronic Measurement Technology Department of Electronic Science and technology, North university of China, Ta

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）