Structure mechanics analysis of three-axis piezoresistive micro accelerometer

摘要：

A three-axis piezoresistive accelerometer based on SOI with single mass was introduced in this paper. In order to preferably command the influence of beam and mass size on the performance，such as stress，displacement and frequency of the structure, then the mathematics model of the four side-eight beam structure was founded by the theory of Mechanics of Material and Mechanics of vibration, the systemic mechanics analysis of the structure was also completed. The static and modal simulations were done by ANSYS ， which can prove the correctness of the mechanics analysis.

关键词： three-axis piezoresistive accelerometer mechanical analysis simulation

作者: Yun-bo Shi Mei-yu Meng Zong-min Ma

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education ,National Key laboratory For Electronic Measurement Technology Department of Electronic Science and technology, North university of China, T

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）