Micro Friction Test Adopting Optical Method
The surface friction and wear mechanism are very different between micro-components because of the big ratio of surface area to bulk, so a special apparatus which can measure the friction between samples on micron scale should be developped, it must be appropriate to test friction and load in MEMS, especially has the properties of wide measuring range and high sensibility. This paper just discusses the design of the testing apparatus, the optical method is adopted to measure the micro vertical press and the sidelong micro friction force at the same time. The principles and system structure of the apparatus are discussed in the paper, and the silicon force sensor made by the MEMS technology are analyzed. The data acquisition system based on the linear array CCD and USB interface is also discussed in this paper, the static and dynamic characteristic of the instrument are described at the end of the paper. The micro-force sensor is made up of silicon slice by MEMS technique, it has some unique advantages that the ordinary sensor hasnt. This apparatus has well linearity and higher precision, it has brought forward a new method in micro friction test.
MEMS micro friction test optical method silicon sensor linear array CCD
YU Zhenglin JIANG Tao CAO Guohua
Electromechanical College, Changchun University of Science and Technology, Changchun, Jilin 130022, China
国际会议
北京
英文
2007-08-05（万方平台首次上网日期，不代表论文的发表时间）