Design of tunneling accelerometer feedback control system based on PID control method

摘要：

To improve the performance and enlarge the dynamic measurement range, tunneling sensors usually are operated in a close-loop mode. Feedback control of the micromachined tunneling accelerometer is implemented by electrostatic feedback driving the electrode, in order to putting into effect the dynamics control of load of the micromachined tunneling accelerometer, this paper researched the qualitative relationship between the feedback driver and the input acceleration, calculated the coefficient of proportion, integral and differential, introduce a guide scheme for the design of the feedback circuit.

关键词： tunneling accelerometer PID control low damping feedback circuit

作者: CHEN Jing HU Qifang SHEN Sanmin

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China),Ministry of Education National Key Laboratory For Electronic Measurement Technology, North university of China, Taiyuan, 0300512 National Key Laboratory of Micro/

会议类型: 国际会议

会议名称: 第七届国际测试技术研讨会

会议地点: 北京

会议语种:英文

在线出版日期: 2007-08-05（万方平台首次上网日期，不代表论文的发表时间）