Current State and Prospect of Micro-Machining

摘要：

Micro-machining is a delicate process that requires pinpoint accuracy. Researchers in academia and industry worldwide are striving to develop efficient fabrication techniques for features in ranges of a few micrometers and even nanometers. The current leading micro-machining processes are micro drilling, micro milling, and micro turning, micro EDM, micro USM, micro LBM, micro ECM and LIGA. In this paper, the latest advances of diverse micromachining technologies will be discussed. Challenges still exist in fields like innovation in workpiece and tool material, development of auxiliary tooling equipment together with processes combination, etc.

关键词： Micro-machining machining processes industrial application

作者: Xiaoxia Li Jiuhe Wang Wen Li

作者单位: School of ManagementYanshan University Qinhuangdao,Hebei Province,China School of Mechanical Engineering and Automation China University of mining & TechnologyXuzhou , Jian

会议类型: 国际会议

会议名称: 2007 IEEE International Conference on Automation and Lofistics

会议地点: 山东济南

会议语种:英文

在线出版日期: 2007-08-18（万方平台首次上网日期，不代表论文的发表时间）