NONLINEAR VIBRATION OF ELECTROSTATICALLY ACTUATED MEMS RESONATORS UNDER PARAMETRIC AND EXTERNAL EXCITATIONS
Electrostatically actuated resonant MEMS (Micro-electro-mechanical Systems) have gotten significant attention due to their geometric simplicity and broad applicability. In this paper, analyses and simulations for the dynamics of electrostatically actuated MEM structures under parametric and external excitations are presented. The presented model and methodology enable simulation of the dynamics of theelectrostatic MEM structure undergoing small motions. The numerical results showing the effects of varying the applied voltages and the squeeze film damping on the resonant frequencies and nonlinear dynamic characteristics are given in detail. Resonant frequency and peak amplitude are examined for variation of the dynamical parameters involved. It is demonstrated that the system goes through a complex nonlinear oscillation as the system parameters change. This investigation provides an understanding of the nonlinear dynamic characteristics of electrostatically actuated resonant MEMS.
Wen-Ming Zhang Guang Meng Di Chen
State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University,800 Dongchuan National Key Laboratory of Micro/Nano Fabrication Technology,Key Laboratory for Thin Films and Micro
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）