SEVERAL KEY TECHNOLOGIES TO IMPROVE SILICON MICROGYRO PERFORMANCE

摘要：

Silicon micromechanical gyroscope is an extraordinarily important micro inertial sensor, which has characteristics of little size, low cost and batch integrated production with huge market. But it now belongs to low or middle level precision angular rate sensor, so it is becoming a key problem to update this sensitivity to high level. This paper presents several key technologies to improve silicon microgyro performancefrom the view of micro-electro-mechanical working principle and minor signal detection of microgyro. The simulation and circuit design are well done, which results testify that these improved technologies have certain academic and practical value to update present low or middle level precision angular rate sensor.

作者: Dunzhu Xia Bailing Zhou Shourong Wang

作者单位: Department of Instrument Science and Engineering, Southeast University, Nanjing 210096, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）