OPTICAL PROPERTY ANALYSIS OF MICROBOLOMETER BASED ON MEMS

摘要：

The optical constant of TiN and amorphous silicon thin film as well as film thickness of thermal resistive amorphous silicon were measuredby ellipsometry apparatus, which were in agreement with the result from SEM section analysis. According to optical admittance matrixtheory, relation between sensing film thickness, resonant cavity height of microbolometer and infrared absorptivity was simulated using FEA(Finite Element Analysis) MatLab software. Optimal film thickness and resonant cavity height for high infrared absorptivity ranging from 3~5 to 8~14 μm atmosphere window infrared bands were achieved, which provides reliable evidence to improve the sensitivity of microbolometer.

关键词： MEMS optical admittance matrix resonant cavity FEA

作者: Shibin Li Zhiming Wu Naiman Liao Yadong Jiang Wei Li Junsheng Yu

作者单位: School of Optoelectronic Information, University of Electronic Science and Technology of China (UEST State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Scien

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）