RESEARCH AND FABRICATION ON EDDY CURRENT SENSOR BASED ON UV-LIGA

摘要：

An analytical model of an eddy current sensor designed for noncontact distance measurement was presented. The device consists of two planar coil (driver coil and pickup coil) stacked on the magnetic core. The planar coil fabricated by UV-LIGA technology with SU8 photoresist was illustrated, and the permalloy magnetic core electroforming process was presented also. Tested with 10-50KHz sine signal, the output voltage on the sensing coil rearched 30mv with an stainless target placed at a distance of 10 m, and the experimental showed a linear relation between the distance and output voltage within 50 m distance. The whole size of the device was: 5mm×1.5mm. The results demonstrated that the device could nondestructive evaluate the distance and be easily integrated on chip.

作者: Xiao-hu Zheng

作者单位: Huaiyin Institute of Technology,Huaian , China;Nanjing University of Aeronautics and Astronautics, Nanjing, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）