THE FABRICATION OF 16*16 MEMS-BASED OPTICAL SWITCH WITH ACCURATE OPTICAL FIBER GROOVES INTEGRATION
In this paper, a novel surface and bulk hybrid micromachining process for fabricating a 16 μ 16 electrostatically-actuated MEMS-based optical switch is introduced. The fabrication enhances the capabilities of rotation type of micromirrors by enlarging their rotation angle to 90degrees, which will provide a wide variety of possible mechanical designs for many optical applications such as scanners and filters, especially those requiring large angular adjustment. Furthermore, monolithic integration of fiber grooves and micromirrors are achieved by utilizing accurate photolithography and etching techniques. The fabricated 2-μ m-thick polysilicon mirrors are able to rotate inward by 90degrees to a vertical position when the applied voltage reaches the pull-in value of 208 V. Under the shortest optical path in the 16 μ 16 switch array, the average and worst-case measurement values of fiber-mirror-fiber insertion loss are 2.27 dB and 2.48 dB, respectively. A fatigue test turns out to show that the micromirrors and torsion beams are quite durable to endure more than 1.368 μ 10 2 billion cycle-tilting movement.
Qinghua Chen Wengang Wu Guizhen Yan Yilong Hao
National Key Laboratory of Micro/Nano Fabrication Technology Institute of Microelectronics, Peking University Beijing, P. R. CHINA
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）